In situ GISAXS investigation of gold sputter deposition onto colloidal polymer templates

نویسندگان

  • A. Buffet
  • Abul Kashem
  • S. V. Roth
چکیده

We investigated in situ the growth of a sputter-deposited gold film (sputtering rate R = 3.2 nm/min) on top of a pre-structured colloidal polymer template using grazing incidence small-angle X-ray scattering (GISAXS [5]). The underlying colloidal polymer template was deposited by using the novel technique of airbrush-spray coating, allowing for the installation of stripe-like trapezoidal pattern consisting of 3D hexagonally close-packed polystyrene (PS) colloids [6].

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تاریخ انتشار 2011